Ellipsometry
Analyte
- Thin organic or inorganic layers in the thickness range of some tenths of a nanometre up to several hundred nanometres
Equipment
Evaluation methods and targets
- Product of thickness and refractive index
- If refractive index of adsorbed material is known: thickness of the adsorbed layer
Application examples
- Thickness determination of thin and ultra-thin polymer layers
- Stepwise monitoring of the build-up of a multilayer system
Comparative and additional methods
- Surface plasmon resonance
- Atomic force microscopy