Surface analysis

Ellipsometry

Analyte

  • Thin organic or inorganic layers in the thickness range of some tenths of a nanometre up to several hundred nanometres

 

Equipment

  • Optrel multiscope

 

Evaluation methods and targets

  • Product of thickness and refractive index
  • If refractive index of adsorbed material is known: thickness of the adsorbed layer

 

Application examples

  • Thickness determination of thin and ultra-thin polymer layers
  • Stepwise monitoring of the build-up of a multilayer system

 

Comparative and additional methods

  • Surface plasmon resonance
  • Atomic force microscopy